Nitrogen Trifluoride Nf3
Fluoride Fluoropolymers Hydrofluoric Acid/Foaming Agent Fluoride Salt Fluorine-Containing

Nitrogen Trifluoride NF3

Duxiu Chemical

Specifications

HS Code

582631

Name Nitrogen Trifluoride
Formula NF3
Molar Mass 71.002 g/mol
Appearance Colorless gas
Odor Odorless (in low concentrations), pungent at high concentrations
Density 3.003 g/L (at 25 °C and 1 atm)
Melting Point -206.85 °C
Boiling Point -129.06 °C
Solubility In Water Slightly soluble
Electronegativity Difference 1.0 (N: 3.04, F: 4.0), polar molecule
Oxidation State Of N +3
Oxidation State Of F -1
Chemical Reactivity Reacts with strong reducing agents, relatively stable under normal conditions
Hazard Toxic, can form explosive mixtures with reducing agents

As an accredited Nitrogen Trifluoride NF3 factory, we enforce strict quality protocols—every batch undergoes rigorous testing to ensure consistent efficacy and safety standards.

Packing & Storage
Packing 10 - cylinder pack of Nitrogen Trifluoride (NF₃) in high - pressure gas cylinders.
Storage Nitrogen trifluoride (NF₃) should be stored in a cool, well - ventilated area away from heat sources and ignition points. It is typically stored in cylinders made of materials like steel, which can withstand its pressure. Keep it separate from combustibles and reactive substances. Regularly check storage containers for leaks to ensure safety.
Shipping Nitrogen trifluoride (NF₃) is shipped in specialized cylinders designed for high - pressure gases. It must be transported in accordance with strict hazardous material regulations due to its oxidizing and potentially toxic nature.
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Nitrogen Trifluoride NF3
General Information
Historical Development
Nitrogen trifluoride, NF₃, is a strange combination of nitrogen and fluorine. It is not recorded in ancient books, and it has not existed since ancient times. It was created by modern craftsmen with new methods due to the advancement of technology.

First, it was first seen in the last century

The shadow of nitrogen trifluoride was first seen in the West, around the 1960s. At that time, chemists explored the variability of fluorine and its stable combination with nitrogen to obtain this gas. Initially, it was only used for academic exploration and fluorination experiments, and was not widely used in industry.

Second, it gradually entered the industrial path

In the 1990s, the semiconductor industry was booming, and silicon wafers, liquid crystals, and solar devices all required high-purity etching methods. Pure fluorine was used first, which was fierce and difficult to control. Later, people turned to nitrogen trifluoride, which was stable and had excellent etching effects, so it became popular in the market.

Third, the merit of replacing fluorine gas

The magic of nitrogen trifluoride is that it can release free fluorine in plasma, which makes etching fast and clean. It is safe to transport and easy to store, so it gradually replaced fluorine gas and became the first choice. Europe, America, Japan, South Korea and other countries were the first to use it, and then it was passed to China, and they all regarded it as a noble and clean assistant.

Fourth, environmental protection discussions followed

In the 21st century, many people are concerned about climate change. Although nitrogen trifluoride has little emission, its greenhouse potential is very high (the global warming potential GWP can reach more than 17,000), which has caused environmental scholars to worry about it. However, it is mostly recycled and purified in factories, and the amount used is gradually being saved, and the industry still values ​​its merits.

Fifth, continuous innovation in modern times

Today's scientific research is exploring how to reduce emissions, improve etching efficiency, or share it with other methods to be more ecological. However, the benefits of nitrogen trifluoride cannot be completely abandoned, and it is still relied on by high technology.
Product Overview
Nitrogen trifluoride, NF₃, is produced by the combination of nitrogen and fluorine. It is a treasure of modern craftsmen. Its nature is quiet and not obvious, its appearance is clear and colorless, its temperament is unusual, and its functions are numerous.

First, the method of production

Nitrogen trifluoride is obtained by combining nitrogen and fluorine in a special reactor, stimulating it with high temperature or electric fire, and then refining it. The process is rigorous. If there is any negligence, it will escape and cause harm. Therefore, all the manufacturers must have fine tools and be careful.

Second, the clarity of its nature

It is colorless in gas state, with a boiling point of about -129°C and a freezing point of about -206°C. It is a gas at room temperature and pressure. It is more stable than fluorine, does not self-ignite, and does not explode, but has a strong oxidizing force. When encountering high-energy electric fields or plasma, it releases free fluorine, which has great etching effect.

Third, the wide range of uses

It is mostly used for semiconductor etching, photovoltaic cell cleaning, and LCD panel repair. It is sharp and gentle, which can not only ensure the precision of etching, but also save the risk of operation, so it is valued by chip factories and optoelectronic factories.

Fourth, safety discussion

Although it is milder than fluorine gas, inhalation can damage the lungs, so a protective mask and ventilation are required. Store in high-pressure cylinders, stay away from fire and heat, check for leaks regularly, and be as cautious as fearing a tiger.

Fifth, environmental protection concerns

Nitrogen trifluoride has a very high greenhouse potential (GWP value is more than 17,000). Although the emission is small, it is harmful to the sky. Factories mostly use recycling and purification methods to reduce emissions, striving to keep pace with the Tao.

Sixth, market trends

Today's high-tech workshops all rely on its cleaning power. Although new alternative gases are gradually being developed, the position of nitrogen trifluoride is still difficult to shake. It is needed all over the world, and the output is steadily increasing, which can be said to be a divine help of craftsmanship.
Physical & Chemical Properties
"On the Physical and Chemical Properties of Nitrogen Trifluoride"
Nitrogen trifluoride (NF3) is a special compound. It has no color, little taste, and is a gas under normal conditions. From a physical point of view, the boiling point is quite low, and it is volatile. This is due to the weak intermolecular force.
In terms of chemical properties, nitrogen trifluoride has strong oxidizing properties. Fluorine is extremely electronegative and causes nitrogen to be in a positive valence state. It can react with many substances under specific conditions. When exposed to water or moisture, it can slowly hydrolyze to form compounds containing fluorine and nitrogen. However, its chemical stability is also considerable. It is difficult to react spontaneously at room temperature and pressure without specific reactants. Due to the stability of the molecular structure, the covalent bond energy is quite high, requiring specific energy excitation to initiate a significant chemical reaction.
Technical Specifications & Labeling
"Technical Specifications and Labels "
Today's product name is nitrogen trifluoride, and its symbol is NF3. The technical specifications of this product are related to many elements. Its purity needs to reach a very high standard, and the impurity content must be minimal.
On the label, clearly indicate the various commodity parameters. The content is accurately marked to allow users to clarify its quality. The appearance is also clearly stated, and it is regarded as a colorless gas. And it is indicated that it has specific chemical properties and physical properties, such as boiling point, melting point and other key values, which are accurately marked.
Such technical specifications and labels can help users use this product properly according to their needs to ensure the safety and accuracy of use.
Preparation Method
"The Method of Making NF
To make NF
, the raw materials and production process are essential. Commonly used, ammonia (NH <) and fluorine (F <) are used as raw materials. The reaction step is to first make ammonia and fluorine meet in a special container, and the following reaction occurs: NH
To ensure a smooth reaction, the temperature and pressure are adjusted. Under appropriate low temperature and moderate pressure, the reaction can proceed in an orderly manner. The catalytic mechanism, the selection of a suitable catalyst, can promote the reaction rate and increase the purity of the product. The catalyst used has a special structure and activity check point, which can make the reactants react efficiently on its surface, so that the preparation of NF can be obtained by this method.
Chemical Reactions & Modifications
"On the Reaction and Properties of Nitrogen Trifluoride"
For nitrogen trifluoride, NF
is also. It is a chemical substance, and it is worth exploring in terms of reaction and properties. The reaction of NF
formation is often formed by the combination of nitrogen and fluorine gas. This reaction is violent and requires specific conditions to control it.
As for its properties, it is oxidizing and can react with many substances. Its stability also has characteristics. Under specific circumstances, it may be decomposable. And because of its unique chemical structure, the electron cloud is diverse, resulting in its variability.
Today's research aims to clarify its reaction mechanism and explore the law of its property change, so as to make good use of it or avoid its harm, which is beneficial to all things in the chemical industry.
Synonyms & Product Names
"Nitrogen Fluoride of the same name and trade name"
Today there is nitrogen fluoride, its scientific name is nitrogen trifluoride, and the chemical formula is NF
. This thing is in the market, and there are many people with the same name, and each merchant takes various trade names due to its characteristics.
Or because of its unique chemical properties, it is widely used in the electronics industry and other industries. Those with the name "Lingfu" are taken from the meaning of agility and fluoride, hoping that it will be used in the production process like a spirit object. Also known as "Huifu No. 3", it is the third of a series of fluorine-containing products, and it has smart characteristics and is suitable for fine craftsmanship.
Although the names are different, they are all nitrogen trifluoride NF
. Businesspeople seek unique names in order to recognize the uniqueness of their products, and users should understand their essence and not be confused by various names in order to make good use of this material and make it useful in various industries.
Safety & Operational Standards
Specifications for the safe production and operation of nitrogen trifluoride
There is nitrogen trifluoride ($NF_3 $) today. Its unique nature is related to the safe production and operation standards, and it cannot be ignored.
Nitrogen trifluoride is highly oxidizing, and in contact with water or humid air, it is prone to corrosive gases such as hydrogen fluoride. Therefore, when storing, it is necessary to choose a dry, cool and well-ventilated place, away from fire and heat sources, and store it separately from easy (can) fuels and reducing agents, and must not be mixed. The storage place should be equipped with leakage emergency treatment equipment and suitable containment materials.
As for the operation, the operator must undergo special training and strictly abide by the operating procedures. When working, wear a self-priming filter gas mask (full mask), tape gas suit, and rubber gloves to prevent gas damage. The operating environment needs to be well ventilated to ensure air circulation. If working in a small space, be more vigilant against gas accumulation.
In the event of a leak, emergency personnel should quickly evacuate the leaking contaminated area to the upper wind, and immediately isolate and strictly restrict access. Emergency responders need to wear self-contained positive pressure respirators and gas suits. Do not let the leak come into contact with combustible substances (such as wood, paper, oil, etc.). Small leaks can be absorbed by inert materials such as sand and vermiculite; if there are large leaks, embankments or pits should be built for containment, and pumps should be transferred to tankers or special collectors for recycling or transportation to waste disposal sites.
In daily life, it is also necessary to regularly check and maintain the storage equipment and operating environment to ensure that there is no risk of leakage, so as to ensure the safety of personnel and production stability. In this way, nitrogen trifluoride can be used safely.
Application Area
"On the Use of Nitrogen Trifluoride ($NF_3 $) "
Today, there is nitrogen trifluoride, which is unique in its properties and has obvious functions in various fields. In the field of microelectronics, this is the key choice for etching gas. Chip manufacturing is delicate and requires precise etching. $NF_3 $can be on the wafer and molded according to regulations. It helps transistors and circuits to be exquisitely composed, so that the chip performance is outstanding.
In chemical vapor deposition, $NF_3 $also helps. It can adjust the reaction environment and promote the uniform growth of thin film materials. It is used in the preparation of semiconductors, optical coatings, etc., with excellent quality. Furthermore, it is also a powerful tool for the study of new compounds. Due to the activity of fluorine, it can introduce new bonds and structures, which is a way for materials to explore. The use of $NF_3 $in various industries is promoting the advancement of science and technology, and the prospect is promising.
Research & Development
On the research and creation of nitrogen trifluoride
Now there is nitrogen trifluoride (NF3), which is gradually showing its ability in various fields. Many researchers have studied it, and it has a wide range of uses because of its unique properties.
At the beginning, everyone's understanding of it was still shallow, and only a little bit of its chemical properties. However, through unremitting research by various scholars, it was found that it can be used as an etching gas in the electronics industry to help the fine fabrication of chips and make circuits more delicate.
It has also been explored in the optical field, and it can also be used to improve the performance of optoelectronic devices. Scientists have worked hard to improve the production method and optimize the purification technique, so that its quality is increasingly high.
At present, the application of NF3 is becoming more and more widespread, and the prospects are promising. Researchers are still working hard to expand its new applications and increase its effectiveness, hoping to shine in the future of science and technology and promote the prosperity of the industry.
Toxicity Research
Research on toxicity of nitrogen fluoride
In modern times, there is something called nitrogen fluoride (NF3), which is gradually useful in chemical industry. However, its toxicity is doubted by everyone, so it is studied.
At first, looking at its properties, nitrogen fluoride is colorless and has a weak irritation. As for toxicity, either there is or there is no, there are different opinions. Then I tried it with white mice and other substances, and placed nitrogen fluoride in a closed place, with white mice in the middle. After a while, the white mice showed discomfort, their hyperactivity gradually slowed down, and their breath was also chaotic.
Analyze its harm to the human body. If a person inhales it, the eyes and throat will be uncomfortable in light cases, such as prickling and itching; in severe cases, the lungs will be invaded, the breath will be shortness and the cough will be coughed, and the organs will be damaged for a long time, endangering life. And it is also harmful to the environment, scattered in the air, or changing the climate, damaging the ecological balance.
In summary, nitrogen fluoride is toxic, and when used in work, care should be taken to prevent its leakage, to ensure people's safety and protect the environment.
Future Prospects
Unseen nitrogen trifluoride
In today's world, nitrogen trifluoride (NF3) is very important in the field. This is a special property, and it is necessary to clean it up when it is used in semi-manufacturing, liquid crystal display production, etc.
In the future, the rapid development of science and technology, and the low cost of semi-production, the low cost NF3 and the supply, the demand must be more stringent. Researchers need to improve their efficiency, reduce costs and increase energy. And the meaning of protection is high, how to reduce the emission of NF3, and reduce the impact of its room efficiency, also need to work. Or there are new technologies, which can be used in a follow-up, or replace other things, and still maintain efficiency. In other words, NF3 has not yet been completed, and there are also challenges when it comes to charging, so it will definitely be able to be used because of it, and the new generation will show its brilliance.
Where to Buy Nitrogen Trifluoride NF3 in China?
As a trusted Nitrogen Trifluoride NF3 manufacturer, we deliver: Factory-Direct Value: Competitive pricing with no middleman markups, tailored for bulk orders and project-scale requirements. Technical Excellence: Precision-engineered solutions backed by R&D expertise, from formulation to end-to-end delivery. Whether you need industrial-grade quantities or specialized customizations, our team ensures reliability at every stage—from initial specification to post-delivery support.
Frequently Asked Questions

As a leading Nitrogen Trifluoride NF3 supplier, we deliver high-quality products across diverse grades to meet evolving needs, empowering global customers with safe, efficient, and compliant chemical solutions.

What are the main uses of nitrogen trifluoride NF3?
Nitrogen trifluoride, NF₃, is a fluorine gas with the same root as nitrogen. Although it is stable at room temperature, it has a sharp edge inside. It is actually relied on by modern craftsmanship and is different from ordinary gas. First, cleaning semiconductors All fine plates for making chips and liquid crystals are often hard to remove. Nitrogen trifluoride, when exposed to high-energy electric fire, releases free fluorine, which is unstoppable and can etch silicon wafers, tungsten, tantalum and other metal films, cleaning their micro-channels. This function is better than the old fluorine gas, because it is more stable, easy to transport and control, and the amount is also saved. Second, cleaning solar photovoltaics Photovoltaic panels often accumulate silicon slag and impurities during refining. Cleaning with nitrogen trifluoride can restore their original cleanliness, increase their light yield, and prolong their life. Therefore, photovoltaic factories often use this gas as a good companion. Third, liquid crystal display repair Liquid crystal glass film also relies on it to etch away residual film during the manufacturing process, helping it to have clear imaging and bright colors. This method is light and does not damage the root material, so it is the best choice. Fourth, chemical synthesis aid Although nitrogen trifluoride is rarely used to directly generate new compounds, it can also be used as a fluorine source in the development of special fluorination or fluorine-containing chemistry. It is applied in the laboratory and has a subtle but specialized function. Fifth, a safe alternative to fluorine gas In the past, pure fluorine gas was often used for cleaning, which was violent and difficult to control; now nitrogen trifluoride is safe and efficient, and is gradually replacing it, which not only ensures personal safety, but also saves the weight of facilities.
What are the physical properties of nitrogen trifluoride?
Nitrogen trifluoride, NF₃, is produced by the interaction of nitrogen and fluorine. It is not obtained naturally, but is artificially created. It is subtle in nature, colorless in shape, and looks like a breeze, which is really magical. First, the gas is light and free Nitrogen trifluoride is a gas at normal temperature and pressure, with a slightly pungent smell, colorless and tasteless. It is invisible to the eyes, but it is noticeable when it enters the nose. Its density is about 1.6 times that of air. Although it is heavier than wind, it is easy to disperse. Second, the condensation and boiling can be measured The boiling point is about -129 degrees Celsius, and the freezing point (freezing point) is about -206 degrees. Therefore, it is difficult to see its liquid condensation even in severe winter, and it needs to be extremely cold to obtain liquid. Third, it is compressed into liquid It is often stored in a high-pressure bottle, and when it is pressurized or low-temperature, it becomes a colorless liquid. When it is liquid, it is as clear as water, but its nature is very strong and should not be underestimated. Fourth, critical properties The critical temperature is about -33 degrees, and the critical pressure is about 4.1 megapascals (Mpa). Beyond this, there is no longer a gas-liquid boundary, and it turns into a supercritical state, and the physical properties suddenly change. Engineering needs to be cautious. Fifth, solubility It is very soluble in water, and slowly releases fluorine in water to generate hydrogen fluoride, which is slightly toxic and corrosive. It can also be soluble in organic solvents such as ethanol and ethers, but its affinity is not very good. Sixth, specific heat and thermal conductivity The specific heat is about 0.84 J/(g·K), the heat capacity is not large, and the thermal conductivity is weak. It can decompose violently when exposed to flames or electric shocks, so it must be prevented from causing harm.
What are the chemical properties of nitrogen trifluoride NF3?
Nitrogen fluoride, NF₃, is a combination of nitrogen and fluorine. It looks colorless like the void, and its gas is light and acrid, which is difficult to distinguish with ordinary eyes. However, its nature is very fierce, and ordinary people cannot approach it lightly. First, it is stable at room temperature This substance is safer than fluorine gas at room temperature and pressure. It does not spontaneously combust or explode. It is a relatively mild one among fluorine compounds. However, when it encounters high heat and strong energy, it can release free fluorine immediately, which is unstoppable. Second, it can be a strong oxidant Nitrogen trifluoride contains fluorine trioxide. When it encounters electric fire or plasma, it can dissociate living fluorine. It is very easy to generate fluoride with metals such as silicon, tungsten, tantalum, and titanium. It is used for semiconductor cleaning, and the effect is particularly wonderful. Third, it slowly releases fluorine when it encounters water Nitrogen trifluoride reacts slowly when it encounters water or water vapor, which is not as fierce as fluorine gas. However, it can also generate hydrogen fluoride and nitrogen oxides after a long time, both of which have corrosive properties. Fourth, it is not flammable in the gas Although fluorine is violent, NF₃ itself is not flammable, nor does it support combustion under normal conditions. However, if it encounters a strong electric fire, it can decompose and generate fluorine gas, which can greatly support the fire. Fifth, it is moderately toxic This gas can damage the respiratory tract when inhaled, and even cause lung damage and respiratory suffocation. Although the toxicity is not as high as pure fluorine, it will be harmful if immersed for a long time, so it should not be ignored.
What are the precautions for nitrogen trifluoride NF3 in the production process?
Nitrogen trifluoride is a compound of nitrogen and fluorine. It has an irregular color, a slightly pungent taste, and is extremely active. It is particularly valuable for semiconductor etching and solar cell cleaning. However, its refining method must be cautious. If it is neglected, it will harm people and things, so it must be observed. First, prevent leakage Fluorine gas is a strong substance. It reacts violently when it comes into contact with water. Leakage can easily cause harm to people and animals. Therefore, the equipment should be sealed first. All valves and joints must be inspected every day and must not be neglected. If there is a slight leak, the fluorine gas should be discharged first and then repaired. Second, control the temperature In the reactor, nitrogen and fluorine meet, and the heat is very fierce. If the temperature is out of control, the product will tend to have more side reactions, or even cause explosion. It needs to be adjusted by cooling water, liquid nitrogen, etc. to ensure stability. Third, prevent moisture Fluorine gas and water vapor meet to generate hydrogen fluoride, which is highly toxic and corrosive, and is a taboo in refining. Therefore, the factory must be dry, and the operator's clothing must be isolated from moisture, and sweat must not be brought in. Fourth, use materials with caution Equipment that comes into contact with fluorine gas must be covered with nickel-based alloys, Hastelloy alloys, or fluoroplastics. If iron, copper, aluminum, etc. are used, they will be corroded and damaged, and the harm will be endless. Fifth, set up first aid Warehouses and work sites should be equipped with first aid medicines, respirators, and protective masks for fluorine poisoning. If there are symptoms of poisoning, move to a breezy place first, and then seek medical treatment without delay. Sixth, deal with tail gas Fluorine tail gas must be treated in an alkali liquid washing tower to remove all residual fluorine before it can be discharged. This is related to the weather and location, as well as the people's hearts and safety, and cannot be ignored.
What are the environmental effects of nitrogen trifluoride NF3?
The environmental impact of nitrogen trifluoride (NF3) is complex and needs to be examined in detail. NF3 is a highly oxidizing gas. In the atmosphere, it can cause harm to the ozone layer. Because of the fluorine atoms it contains, it can react with ozone under certain conditions. Once released into the atmosphere, NF3 will gradually rise to the stratosphere after diffusion and migration. In the stratosphere, ultraviolet radiation prompts NF to undergo a photolysis reaction, releasing fluorine atoms. Fluorine atoms are extremely reactive and can react in a chain with ozone molecules (O ), such as: F+O → FO+O , and the generated FO will react with other oxygen atoms (O), namely FO+O → F+O . During this process, fluorine atoms act as catalysts, continuously depleting ozone, resulting in the thinning of the ozone layer. The ozone layer is of great significance to the earth. It absorbs most of the ultraviolet rays in the solar radiation and protects life on earth from excessive ultraviolet rays. If the ozone layer is destroyed and the ultraviolet radiation increases, it will cause many adverse effects on the survival and reproduction of living things. For example, the probability of human skin cancer and cataracts increases; the photosynthesis of plants is disturbed, which affects crop yield and ecosystem balance; marine plankton will also be damaged due to enhanced ultraviolet rays, which in turn affects the stability of marine food chains and ecosystems. Furthermore, NF3 is a greenhouse gas itself. Although its content in the atmosphere is relatively low, its global warming potential is quite high. In the atmosphere, NF3 can persist for a long time, absorb and re-radiate the infrared radiation emitted by the earth's surface, causing the earth's surface temperature to rise and exacerbating global warming. Global warming will trigger a series of chain reactions, such as melting glaciers, rising sea levels, and increasing extreme climate events, which seriously threaten the living environment and social and economic development of human beings. In summary, nitrogen trichloride (NF3) has a significant impact on the environment, and strict measures need to be taken in the production, use, and discharge processes to reduce its negative effects on the environment.